Semiconductor Recipe Simulator
Step 1
Temperature (°C)
Ramp Rate (°C/s)
N2 Flow (SLM)
Pressure (Torr)
Endpoint
Time (sec)
Temperature Above X
Temperature Below X
Step 2
Temperature (°C)
Ramp Rate (°C/s)
N2 Flow (SLM)
Pressure (Torr)
Endpoint
Time (sec)
Temperature Above X
Temperature Below X
Step 3
Temperature (°C)
Ramp Rate (°C/s)
N2 Flow (SLM)
Pressure (Torr)
Endpoint
Time (sec)
Temperature Above X
Temperature Below X
Step 4
Temperature (°C)
Ramp Rate (°C/s)
N2 Flow (SLM)
Pressure (Torr)
Endpoint
Time (sec)
Temperature Above X
Temperature Below X
Step 5 (Ramp Down)
Temperature (°C) - Target: 0
Ramp Rate (°C/s)
N2 Flow (SLM) - Target: 0
Pressure (Torr) - Target: 0
Endpoint
Temperature Below X
Start Recipe
Reset
Temperature (°C)
N2 Flow (SLM)
Pressure (Torr)