Instructions:
• Click manual valves to open/close
• Click 3-way valves to switch between process gas and N2 purge
• Set MFC flow rates (max 1000 sccm) to activate MFC and valves
• Pressure affects maximum achievable flow:
- 50+ psi: 100% of requested flow
- 40 psi: 80% max flow
- 30 psi: 60% max flow
- 20 psi: 40% max flow
• MFC turns orange when flow-limited by pressure
• Particles animate based on actual flow rate